Visible light irradiation effects on chemical bonding structure of amorphous carbon nitride thin films using synchrotron radiation infrared rays

Using high-intensity infrared (IR) rays from the SPring-8 synchrotron radiation, we investigated relationship between photo-induced deformation and in-plane distribution of chemical bonding state amorphous carbon nitride (a-CNx) thin films prepared via reactive sputtering. The film deposited at 573 K has largest amount 873 shows no photoresponse. When beam diameter was reduced to a few micrometers, were irradiated with IR obtain spectra each point on surface. Consequently, it discovered that a-CNx not uniform in plane, spectral intensity range 1100–1800 cm−1 stronger or weaker depending location. visible light laser, absorption band assigned based sixfold ring structure containing nitrogen CN chain increased by 8%–10% underwent deformation. In deformation, irradiation change observed.